Progress of Research on Nanotribology of Microelectromechanical System
Wang Qingliang Wang Aijun Ge Shirong Liu Jinlong (College of Mechanical & Electrical Engineering, CUMT, Xuzhou 221008)
With swift developing of nanotribology and microelectromechanical system ( MEMS) , microtri-bology of MEMS is one of the most active research areas in nanotribology. It is found that the systematic perform-ance , operating stability and service life of MEMS are determined to great extent by friction and wear on nanom-eter scale. So it is most important to understand the microtribological properties. The latest development of re-searches on nanotribology of MEMS including environment , the features of friction and wear the application of surface modification as well as the ultra - thin film lubrication for MEMS is reviewed. Finally, some suggestions about the further study on the nanotribology of MEMS are proposed.